Background of screw vacuum pump

Time:2022.11.18Browse:

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Screw type dry vacuum pump is widely used in electronics, nuclear energy, chemical industry, medicine, food industry and other fields. In the semiconductor industry, it is used in the CVD process of chip production, LCD manufacturing, etching, and PLASMA production. In the nuclear industry, it is used for nuclear reactors and obtaining vacuum in the nuclear industry; In chemical industry, it is used for vacuum distillation and solvent extraction to recover solvent efficiently. In fatty acid production, it is used to eliminate water pollution and remove the blockage in the ejector; In the pharmaceutical industry, it is used to recover liquid medicine and pharmaceutical intermediates, provide clean and sterile conditions for the production of artificial organs, and recover gas disinfectants; It is widely used in the food industry for the concentration of spices, essence, food packaging and other applications.


Due to its superior performance, the dry screw vacuum pump has become the first choice for vacuum acquisition equipment in microelectronics, semiconductor, pharmaceutical, precision processing and other industries in Europe, America and Japan. Based on the screw compressor, Japan has long developed the multi head rotor profile of vacuum pump and put it into the market. Several German vacuum equipment companies have also gradually developed equal pitch and variable pitch rotor profiles, and have done a lot of research on the key technical problems of screw pumps in the rotor and body cooling

The advent of the screw vacuum pump broke the monopoly of foreign dry screw vacuum pump technology, making China the sixth country to master oil-free dry screw vacuum pump technology, greatly reducing the production cost of enterprises, and the design of environment-friendly pressure screw vacuum pump because it no longer uses sealing fluid or a large amount of vacuum oil, thus reducing the use cost and reducing environmental pollution, The two screw rotors rotate reversely in the pump chamber driven by a pair of synchronous gears. This structure is simple. The single-stage air extraction method can effectively avoid the accumulation of process raw materials into the pump chamber. There is no contact between the screws and between the screws and the pump body. Therefore, a certain amount of liquid and soft particles can be pumped out. Screw vacuum pump has high vacuum degree, which can be used alone or as a front stage pump to form a medium high vacuum system with Roots vacuum pump.


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